000 00296nam a22001097a 4500
999 _c60173
_d60173
020 _a9783662606223
100 _aFahrner W R
245 _aNanotechnology and Nanoelectronics Materials Devices Measurement Techniques
260 _aNew York
_bSpringer
_c2020
300 _axvi+269
942 _cBK