000 00310nam a2200121Ia 4500
020 _a9780198084808
100 _aStephen A Campbell
245 _aScience and Engineering of Microelectronic Fabrication
250 _a2nd
260 _bOxford University Press
_aNew York
_c2013
300 _axiv+603
942 _cBK
999 _c57369
_d57369