000 00286nam a2200109Ia 4500
999 _c17075
_d17075
020 _a0805368507
100 _aMaly W
245 _aAtlas of IC Technology: An Introduction to VLSI processes
260 _c1987
_bTHE BENJAMIN / CUMMINGS PUB.
_aCalifornia
300 _axi+340
942 _cREF