Science and Engineering of Microelectronic Fabrication (Record no. 57369)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00310nam a2200121Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780198084808 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Stephen A Campbell |
| 245 ## - TITLE STATEMENT | |
| Title | Science and Engineering of Microelectronic Fabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher, distributor, etc. | Oxford University Press |
| Place of publication, distribution, etc. | New York |
| Date of publication, distribution, etc. | 2013 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Page | xiv+603 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | BOOKS |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price | Full call number | Barcode | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| NSS COLLEGE OF ENGINEERING | NSS COLLEGE OF ENGINEERING | GENERAL STACK AREA | 06/02/2015 | 525.00 | 621.381 CAM/S | 56652 | BOOKS |