APA
Stephen A Campbell, . (1996). Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press.
Chicago
Stephen A Campbell, . 1996. Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press.
Harvard
Stephen A Campbell, . (1996). Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press.
MLA
Stephen A Campbell, . Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press. 1996.